Auto Focus Module
iFocus is the real-time auto focus model.
It is applied to the automatic optical inspection (AOI) of a high magnification optical system that measures the target object’s position in real time and sets the optical image to detect defects of 1μm or less quickly in semiconductor and display inspection.
Features
Auto focus function
Auto focus function to set the focus automatically
Focus Update Rate
Focus Update Rate 2.0kHz
Capture Range
Capture Range : ± 3,000μm
FPGA
High-speed FPGA-based
Real Time
Real-time location measurement
Multi Layer
Available Multi Layer (Max. 5)
Line-up
IT-AFM-V1
AutoFocus Module
| Sampling Rate | Up to 1.0KHz |
|---|---|
| Sensing Type | Optical Triangulation |
| Tube Module | x1.0 Mag, 21mm Image Circle |
| Capture Range | 3,000μm |
| Laser | Wavelength 655 ± 5(nm) 32mA |
| Interface | RS-485 (Up to 921,600bps) |
| Input Voltage | 12 ~ 36V |
| Stroke | 10mm (±5mm) |
| Resolution | 0.05μm/pulse |
| Linearity Error | < 0.1%(Varies Depending on the Optic Performance) |
| Repeatability | < 0.2μm(Varies Depending on the Optic Performance) |
IAF-LLC03
Linear Lens Changer
| Manual | Drawing | Software |
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The Linear Lens Changer (LLC) is an Objective Lens Changer based on a high-speed Linear Shaft motor.
It can shift the adjacent lenses within 0.2 seconds, ensuring ±1μm accuracy.
Applied to iCore's iFocus (Auto Focus Module), it provides an optimized solution.
| # of Lens port | 3 |
|---|---|
| Lens Spacing Center to Center | 38㎜ |
| Thread type | M26 × 36TPI (Mitutoyo Lens) |
| Lens Changing Time | < 0.2s |
| Motor type | Servo Motor (Linear Shaft Motor) |
| Linear Scale Encoder Resolution | 0.1μm |
| Accuracy | ± 1μm |
| Stroke | ± 80㎜ (@ 3Lenses) |
| Mechanical Guide | Cross Roller Guide |
IT-AF-M1
Auto Focus Sensor
The auto focus sensor & controller (IT-AF-M1) is a product integrating various functions for auto focus such as displacement measurement, motion control, and laser control.
It also provides various interface options such as analog output, digital output function, and step motor drive so that it can be applied to AF systems under various conditions.
| Focus Update Rate | 1kHz |
|---|---|
| Measure Range | 3,000μm |
| Sensing Type | Optical triangulation |
| Interface | RS485 (9,600 bps~921,600 bps) |
| Input Voltage | 24V, 0.5A |
| Linearity Error | 0.1% (Depends on Optics) |
| Repeatability | < 0.2μm (Depends on Optics) |
| Function | Auto Exposure / Auto Laser Control Laser Brightness Control by PD Feedback Multiple Layer Detection (Max.5) Support Real-time Graph Display |
IP-AF1
AutoFocus Module
| Manual | Drawing | Software |
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| Contents | IP-AF1 |
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| Sensor Active Area | 6mm (Length) × 1mm (Width) |
| Max Sampling Speed | |
| Input | Output |
| 100kHz 16/18 bit ADC Analog Input BW : 100kHz | Output Signal : -10 ~ 10V (Differential) Output Signal : -5 ~ 5V (Single ended) Output impedance : 50ohm Analog Output BW : 50kHz |
| Position Resolution | < 0.15μm (at Single Sampling) |
| Linearity Error | < 0.4% |
| Digital Interface | RS-485 (Modbus) |
| Operation | Off, Continuous, Pulse |
| Display | Position, Brightness, Error Code |
| Power Input | Normal Operation : 24V / 0.1A Power Input Range : 8 ~ 48V |
| Power Consumption | < 0.5W |
| Function | 1 Ambient Light Cancelling Function 2 Laser Current Control 3 Low Pass Filter Setting 4 Output Gain / Offset Control 5 Position Range Setting |
Focus Update Rate
Auto focus function to set the focus automatically
Since the depth of field (DOF) is very shallow in high magnification optical systems, changing the height of the object may cause out of focus.
iCore provides a solution that measures the distance and maintains a constant distance between the target object and the optical system in real time.
Video
This is an ISAF product promotional video.
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